OXYGEN ION-BEAM POLISHING OF A 5-CM-DIAMETER DIAMOND FILM

被引：12

作者：

BOVARD, BG

ZHAO, TJ

MACLEOD, HA

机构：

来源：

APPLIED OPTICS | 1992年 / 31卷 / 13期

关键词：

D O I：

10.1364/AO.31.002366

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A 5-cm diameter, 1-mu-m (peak to valley) rough diamond film has been polished to optical quality by an oxygen-ion beam. The rms and peak-to-valley roughness values of the polished surface have been lowered to 5.5 and 55.4 nm, respectively. Reactive ion beam polishing provides a low-temperature (140-degrees-C), noncontact, and precisely controllable approach to improving the surface quality of diamond films. This progress is essential to the use of diamond coatings in optical applications.

引用

页码：2366 / 2369

页数：4