RUTHENIUM IMPREGNATION OF PLASMA GROWN ALUMINA FILMS

被引：19

作者：

HALVERSON, DE ^{[1
]}

COCKE, DL ^{[1
]}

机构：

[1] TEXAS A&M UNIV,DEPT CHEM,COLLEGE STN,TX 77843

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 01期

关键词：

D O I：

10.1116/1.575729

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：40 / 48

页数：9

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