INTERFEROMETER FOR MEASURING DISPLACEMENT AND DISTANCE

被引:80
作者
KUBOTA, T
NARA, M
YOSHINO, T
机构
[1] NIPPON KOUGAKU KK,SHINAGAWA KU,TOKYO 140,JAPAN
[2] UNIV TOKYO,INST IND SCI,MINATO KU,TOKYO 106,JAPAN
关键词
D O I
10.1364/OL.12.000310
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
引用
收藏
页码:310 / 312
页数:3
相关论文
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[5]  
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