REDUCTION OF OUTGASSING RATE OF SUS316 AND OFC CLASS-1 BY PREBAKING IN A VACUUM FURNACE - APPLICATION TO GRAVITATIONAL-WAVE EXPERIMENTS

被引：4

作者：

MATUDA, N

SAITO, Y

OGAWA, Y

AKAISHI, K

HORIKOSHI, G

机构：

[1] NATL LAB HIGH ENERGY PHYS,KEK,TSUKUBA,IBARAKI 305,JAPAN

[2] NATL INST FUS SCI,CHIGUSA KU,NAGOYA 46401,JAPAN

[3] TSUKUBA COLL TECHNOL,TSUKUBA 305,JAPAN

来源：

VACUUM | 1993年 / 44卷 / 5-7期

关键词：

D O I：

10.1016/0042-207X(93)90068-L

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A high performance uhv system is required for a large-scaled interferometer used for gravitational-wave experiments. Pressures of 10(-6) Pa or less are necessary for its stable operation. Quick pumping is also required for frequent exposure to the atmosphere in the preliminary experiments. So materials used for very long vacuum ducts in the uhv system should have a low outgassing rate and a low gas-adsorption probability. Surface modification techniques such as high - temperature prebaking (550-degrees-C x 100 h) in the vacuum furnace and TiN coating were adopted for this purpose. Evacuation properties of the test ducts (1 m long x 0.15 m in diameter) made of SUS316 and OFC Class-1 prebaked in a vacuum furnace were investigated.

引用

页码：443 / 445

页数：3