CRITICAL ALIGNMENTS IN PLANE MIRROR INTERFEROMETRY

被引：18

作者：

BOBROFF, N

机构：

[1] IBM Thomas J. Watson Research Center, Yorktown Heights, NY

来源：

PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING | 1993年 / 15卷 / 01期

关键词：

INTERFEROMETERS; METROLOGY; COORDINATE MEASUREMENT;

D O I：

10.1016/0141-6359(93)90276-G

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Each axis of a plane mirror interferometer has three associated measurement vectors: the interferometer beam, mirror normal, and axis of measurement. The transducer axis of a plane mirror interferometer target is the mirror normal. This contrasts with a retroreflector for which the transducer axis is the interferometer beam. The classical cosine error in x-y plane mirror interferometry is removed by the orienting the mirror normals in the travel plane. The axes do not have to be orthogonal to eliminate cosine error.

引用

页码：33 / 38

页数：6