MEASUREMENT OF NEGATIVE-ION AND NEGATIVE-CLUSTER SPUTTERING WITH HIGHLY-CHARGED HEAVY-IONS

被引：8

作者：

SCHIWIETZ, G ^{[1
]}

BRIERE, M ^{[1
]}

SCHNEIDER, D ^{[1
]}

MCDONALD, J ^{[1
]}

CUNNINGHAM, C ^{[1
]}

机构：

[1] LAWRENCE LIVERMORE NATL LAB,LIVERMORE,CA 94550

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1995年 / 100卷 / 01期

关键词：

D O I：

10.1016/0168-583X(95)00189-1

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A single-detector technique for the measurement of negative ion time-of-flight spectra is introduced in this work. Spectra are presented for 390 keV Xe44+ ions at normal incidence on different samples. Mass distributions for C-n and SinOm clusters indicate that highly charged ions lead to a statistical off-surface formation of heavy clusters, whereas low-energy singly-charged ions may directly produce heavy carbon clusters. The detection technique has proven to be very efficient and might even be used as a nearly non-destructive surface-analysis method for investigations of time dependent surface modifications.

引用

页码：47 / 54

页数：8

共 47 条

[1] NEUTRAL AND NEGATIVE-ION CLUSTER EMISSION DURING SPUTTERING [J].