DIFFUSION OF DONOR AND ACCEPTOR ELEMENTS IN SILICON

被引：362

作者：

FULLER, CS

DITZENBERGER, JA

机构：

来源：

关键词：

D O I：

10.1063/1.1722419

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：544 / 553

页数：10

共 27 条

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