INFLUENCE OF PLATINUM INTERLAYERS ON THE ELECTRICAL-PROPERTIES OF RUO2/PB(ZR0.53TI0.47)O-3/RUO2 CAPACITOR HETEROSTRUCTURES

被引：163

作者：

ALSHAREEF, HN ^{[1
]}

BELLUR, KR ^{[1
]}

KINGON, AI ^{[1
]}

AUCIELLO, O ^{[1
]}

机构：

[1] MICROELECTR CTR N CAROLINA,DIV ELECTR TECHNOL,RES TRIANGLE PK,NC 27709

来源：

APPLIED PHYSICS LETTERS | 1995年 / 66卷 / 02期

关键词：

D O I：

10.1063/1.113558

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Lead zirconate titanate, Pb(ZrxTi1-x)O3 or PZT, thin films grown on RuO2 electrodes by the sol-gel process have excellent resistance to polarization fatigue, but they generally have two drawbacks. The films have high leakage currents and large property variation. In this letter we show that the use of a thin Pt layer (100 Å) deposited on the bottom RuO2 electrode to fabricate RuO2/PZT/Pt/RuO2/(100)MgO capacitors has two important effects. It reduces capacitor leakage by two to four orders of magnitude and it significantly reduces the large property variation. In addition, these capacitors retain their excellent resistance to polarization fatigue which is characteristic of the RuO2/PZT/RuO2 heterostructure. © 1995 American Institute of Physics.

引用

页码：239 / 241

页数：3

共 11 条

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[5] CONTROL OF STRUCTURE AND ELECTRICAL-PROPERTIES OF LEAD-ZIRCONIUM-TITANATE-BASED FERROELECTRIC CAPACITORS PRODUCED USING A LAYER-BY-LAYER ION-BEAM SPUTTER-DEPOSITION TECHNIQUE
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[8] Lichtenwalner D. J., 1994, Ferroelectrics, V152, P97, DOI 10.1080/00150199408017603
[9] FATIGUE AND RETENTION IN FERROELECTRIC Y-BA-CU-O/PB-ZR-TI-O/Y-BA-CU-O HETEROSTRUCTURES
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