A NEW BESSEL-BOX ENERGY ANALYZER FOR SPUTTERED NEUTRAL MASS-SPECTROMETRY

A new type energy analyzer with an electron impact ionizer for sputtered neutral mass spectrometry (SNMS), which is compact enough to be mounted in secondary ion mass spectrometry (SIMS) instruments, has been developed. The compact energy analyzer, called a modified Bessel-Box, enables energy distribution of slow charged particles with different energy resolutions to be obtained by changing the ratio of voltages applied to the analyzer. Applying this system for SNMS of Al-Mg alloy under different partial pressures of oxygen, it has been confirmed that SNMS is free from oxygen enhancement, allowing the quantification of matrix elements with considerable accuracy. It has also been revealed that the space-charge effect caused by bombarding electrons becomes fairly marked, resulting in the deformation and shift of energy distributions of the postionized particles. © 1990 The Japan Society of Applied Physics.