CF4 PLASMA-ETCHING ON LINBO3

被引：30

作者：

LEE, CL

LU, CL

机构：

[1] Institute of Electronics, National Chiao Tung University, Hsin-Chu

来源：

APPLIED PHYSICS LETTERS | 1979年 / 35卷 / 10期

关键词：

D O I：

10.1063/1.90959

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

CF4 plasma etching was applied to LiNbO3. Ridge structures as thin as 3 μm were fabricated. The resolution was limited by photolithography Al masks. The etched surface showed an optical quality. A horn structure ridge channel wave guide of a width of 20 μm was also etched, and demonstrated good quality in guiding optical waves.

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页码：756 / 758

页数：3

相关论文

共 9 条

[1] OPTICAL-WAVEGUIDE PARABOLIC COUPLING HORNS [J].

BURNS, WK ;

MILTON, AF ;

LEE, AB .

APPLIED PHYSICS LETTERS, 1977, 30 (01) :28-30

[2] GEODESIC LENSES IN SINGLE-MODE LINBO3 WAVEGUIDES [J].

CHEN, BU ;

MAROM, E ;

LEE, A .

APPLIED PHYSICS LETTERS, 1977, 31 (04) :263-265

[3]

Garvin H L, 1973, Appl Opt, V12, P455, DOI 10.1364/AO.12.000455

[4]

GARVIN HL, 1973, SOLID STATE TECHNOL, V16, P31

[5] LITHIUM-NIOBATE RIDGE WAVEGUIDE MODULATOR [J].

KAMINOW, IP ;

RAMASWAMY, V .

APPLIED PHYSICS LETTERS, 1974, 24 (12) :622-624

[6] RIDGE WAVEGUIDE WITHOUT HIGH REFRACTIVE-INDEX LAYER - MULTILAYER SIDE CLADDED RIDGE WAVEGUIDE [J].

MORI, H .

APPLIED OPTICS, 1978, 17 (01) :105-108

[7] INTEGRATED-OPTICS AND NEW WAVE PHENOMENA IN OPTICAL-WAVEGUIDES [J].

TIEN, PK .

REVIEWS OF MODERN PHYSICS, 1977, 49 (02) :361-420

[8] CHIRP-GRATING LENS FOR GUIDED-WAVE OPTICS [J].

YAO, SK ;

THOMPSON, DE .

APPLIED PHYSICS LETTERS, 1978, 33 (07) :635-637

[9]

1978, SOLID STATE TECH APR