EVALUATION OF ISABELLE FULL CELL ULTRAHIGH-VACUUM SYSTEM

被引：1

作者：

FOERSTER, CL

BRIGGS, J

CHOU, TS

STATTEL, P

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 18卷 / 03期

关键词：

D O I：

10.1116/1.570872

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1001 / 1004

页数：4

共 6 条

[1]

ALPERT D, 1958, HDB PHYSIK, V12, P612

[2] REDUCTION OF STAINLESS-STEEL OUTGASSING IN ULTRA-HIGH VACUUM [J].

CALDER, R ;

LEWIN, G .

BRITISH JOURNAL OF APPLIED PHYSICS, 1967, 18 (10) :1459-&

[3] PUMPING BEHAVIOR OF SPUTTER ION PUMPS [J].

CHOU, TS ;

MCCAFFERTY, D .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 18 (03) :1148-1151

[4]

HAYWARD WH, 1963, 10TH T NAT VAC S

[5] ULTRAHIGH-VACUUM SYSTEM FOR ISABELLE FULL CELL [J].

SKELTON, R ;

BRIGGS, J ;

CHOU, TS ;

FOERSTER, C ;

STATTEL, P .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (01) :342-344

[6]

1978, BNL50718, P130