SOME SPECIAL PUMPING PROBLEMS ASSOCIATED WITH SPUTTERING APPLICATION

被引：9

作者：

LAMONT, LT ^{[1
]}

机构：

[1] VARIAN ASSOC,PALO ALTO,CA 94303

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1973年 / 10卷 / 01期

关键词：

D O I：

10.1116/1.1317954

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：251 / 253

页数：3

共 11 条

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JONES, DW ;

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SANTELER, DJ .

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[9]

SHIRN GA, 1969, 3 P S DEP THIN FILMS, P123

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