THERMAL ANNEALING OF RF-SPUTTERED NBN

被引:6
作者
CARTER, WL
CUKAUSKAS, EJ
机构
关键词
D O I
10.1109/TMAG.1987.1065019
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:847 / 850
页数:4
相关论文
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