FUNDAMENTALS AND APPLICATIONS OF VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY

被引：62

作者：

WOOLLAM, JA ^{[1
]}

SNYDER, PG ^{[1
]}

机构：

[1] UNIV NEBRASKA,DEPT ELECT ENGN,LINCOLN,NE 68588

来源：

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1990年 / 5卷 / 02期

基金：

美国国家航空航天局;

关键词：

D O I：

10.1016/0921-5107(90)90069-N

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Being able to accurately select the angle of incidence and spectral range for measurements makes ellipsometry a very powerful tool for materials, surface and interface analysis. The technique is fast, totally computer automated and can be performed at atmospheric pressure. It is totally non-invasive and is sensitive to fractions of atom layer thicknesses. We illustrate the power of variable angle spectroscopic ellipsometry with three examples: optical coatings; surface roughness and wetting; electric field effects in semiconductor studies. © 1990.

引用

页码：279 / 283

页数：5

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