X-RAY PHOTOELECTRON-SPECTROSCOPY OF SPUTTERED PLATINUM THIN-FILMS CONTAINING LARGE AMOUNTS OF CARBON

被引:8
作者
DELRUE, JP [1 ]
PIREAUX, JJ [1 ]
CAUDANO, R [1 ]
ROBERT, T [1 ]
HECQ, A [1 ]
机构
[1] UNIV MONS,CHIM INORGAN LABS,B-7000 MONS,BELGIUM
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 19卷 / 02期
关键词
D O I
10.1116/1.571115
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:257 / 259
页数:3
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