AN IONIZATION GAUGE WITH A COLD ELECTRON SOURCE FOR AN EXTREMELY HIGH-VACUUM

被引：21

作者：

OSHIMA, C

SATOH, T

OTUKA, A

机构：

[1] Department of Applied Physics, Waseda University, Shinjyuku, Tokyo, 169

来源：

VACUUM | 1993年 / 44卷 / 5-7期

关键词：

D O I：

10.1016/0042-207X(93)90104-I

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

An ionization gauge with a cold electron source has been constructed, and its performance has been evaluated. The Spindt emitter used as the cold source has shown the stable emission current of 1 mA, and the low outgas condition has been obtained after the long operation of 1 mA emission for approximately 1 month. Between the cold and hot electron sources, no large difference concerning the stability of the emission and the outgas has been detected in extremely high vacuum of 1 x 10(-10) Pa, and the sensitivity of the gauge with the cold electron source (1.9 x 10(10) cps Pa-1 at 0.1 mA reduced for nitrogen gas) was slightly higher than that of the gauge with the hot electron source.

引用

页码：595 / 597

页数：3