DESIGN, FABRICATION, AND TESTING OF SILICON MICROGIMBALS FOR SUPER-COMPACT RIGID DISK DRIVES

被引：13

作者：

TEMESVARY, V ^{[1
]}

WU, SY ^{[1
]}

HSIEH, WH ^{[1
]}

TAI, YC ^{[1
]}

MIU, DK ^{[1
]}

机构：

[1] CALTECH,DEPT ELECT ENGN,PASADENA,CA 91125

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 1995年 / 4卷 / 01期

关键词：

D O I：

10.1109/84.365366

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper documents results related to design optimization, fabrication process refinement, and micron-level static/dynamic testing of silicon micromachined microgimbals that have applications in super-compact computer disk drives as well as many other engineering applications of microstructures and microactuators requiring significant out-of-plane motions, The objective of the optimization effort is to increase the in-plane to out-of-plane stiffness ratio in order to maximize compliance and servo bandwidth and to increase the displacement to strain ratio to maximize the shock resistance of the microgimbals, ,while that of the process modification effort is to simplify in order to reduce manufacturing cost, The testing effort is to characterize both the static and dynamic performance using precision instrumentation in order to compare various prototype designs.

引用

页码：18 / 27

页数：10

共 13 条

[1] TRACKING DYNAMICS OF IN-LINE SUSPENSIONS IN HIGH-PERFORMANCE RIGID DISK DRIVES WITH ROTARY ACTUATORS [J].

CHIOU, SS ;

MIU, DK .

JOURNAL OF VIBRATION AND ACOUSTICS-TRANSACTIONS OF THE ASME, 1992, 114 (01) :67-73

[2]

Hosaka H., 1993, Proceedings. IEEE. Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.93CH3265-6), P12, DOI 10.1109/MEMSYS.1993.296943

[3] STRAIN COMPENSATION BY GE IN B-DOPED SILICON EPITAXIAL-FILMS [J].