SYNTHESIS OF FERROELECTRIC THIN-FILMS AND CERAMICS FROM SOLUTION PROCESSES

被引：12

作者：

FAURE, SP ^{[1
]}

BARBOUX, P ^{[1
]}

GAUCHER, P ^{[1
]}

GANNE, JP ^{[1
]}

机构：

[1] UNIV PARIS 06,CHIM MAT CONDENSEE,F-75532 PARIS 05,FRANCE

来源：

FERROELECTRICS | 1992年 / 128卷 / 1-4期

关键词：

D O I：

10.1080/00150199208015060

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

sol-gel method has been investigated for synthesis of ferroelectric PbZr1-xTixO3 (PZT) thin films using a precursor solution of alkoxides. The precursor is modified with acetylacetone in order to decrease its sensitivity towards hydrolysis. The sol with low viscosity is deposited onto platinized silicon substrate by spin-coating. Sols with different x ratios have been studied in order to compare the reactivities of zirconium and titanium precursors. Techniques like infrared spectroscopy and x-rays diffraction have been used in order to characterize the synthesis steps from the alkoxide to the final ceramic films. Finally, electrical measurements have been made on the film, showing the influence of pyrochlore phase for the Zr rich composition.

引用

页码：19 / 24

页数：6

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