ULTRAFINE GRAIN-SIZE TIN-OXIDE FILMS FOR CARBON-MONOXIDE MONITORING IN URBAN ENVIRONMENTS

被引:37
作者
BARBI, GB
SANTOS, JP
SERRINI, P
GIBSON, PN
HORRILLO, MC
MANES, L
机构
关键词
CARBON MONOXIDE SENSORS; GRAIN SIZE; TIN OXIDE;
D O I
10.1016/0925-4005(95)85122-4
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Various types of ultrafine grain-size SnO2 sensors have been fabricated using a reactive sputtering technique. Some have been doped using two different techniques: deposition (by sputtering) of a thin layer of platinum or platinum implantation. The samples are characterized using ellipsometry, ESCA/Auger spectroscopy, glancing angle XRD and RES. Sensor sensitivity measurements are carried out in the CO concentration range 5-100 ppm in dry air between 100 and 350 degrees C. For non-doped samples, the sensitivity is found to increase with temperature. The results obtained with the Pt-implanted sensors are variable and merit further investigation. The effects of the presence of low concentrations of NO2 in NO2/CO atmospheres have also been analyzed. It can be shown that a selective response to NO2 and CO/air mixtures can be achieved by a suitable choice of the sensor operating temperature.
引用
收藏
页码:559 / 563
页数:5
相关论文
共 7 条