FLUID SIMULATIONS OF RADIO-FREQUENCY GLOW-DISCHARGES - 2-DIMENSIONAL ARGON DISCHARGE INCLUDING METASTABLES

被引：41

作者：

LYMBEROPOULOS, DP ^{[1
]}

ECONOMOU, DJ ^{[1
]}

机构：

[1] UNIV HOUSTON,DEPT CHEM ENGN,PLASMA PROC LAB,HOUSTON,TX 77204

来源：

APPLIED PHYSICS LETTERS | 1993年 / 63卷 / 18期

关键词：

D O I：

10.1063/1.110454

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Two-dimensional self-consistent fluid simulations of a 13.56 MHz argon glow discharge including metastable species were performed as examples of a coupled glow-discharge/neutral-transport-and-reaction system. The electron density was found to peak in the radial direction. The metastable density profiles showed ''hot spots'' in both axial and radial directions.

引用

页码：2478 / 2480

页数：3

共 21 条

[1]

DALVIE M, 1992, IBM RC18313 RES REP

[2]

ECONOMOU DJ, 1993, UNPUB 3RD P INT S PR

[3]

ECONOMOU DJ, IN PRESS

[4] CONTINUUM MODELING OF RADIOFREQUENCY GLOW-DISCHARGES .1. THEORY AND RESULTS FOR ELECTROPOSITIVE AND ELECTRONEGATIVE GASES [J].

GOGOLIDES, E ;

SAWIN, HH .

JOURNAL OF APPLIED PHYSICS, 1992, 72 (09) :3971-3987

[5] CONTINUUM MODELING OF RADIOFREQUENCY GLOW-DISCHARGES .2. PARAMETRIC STUDIES AND SENSITIVITY ANALYSIS [J].

GOGOLIDES, E ;

SAWIN, HH .

JOURNAL OF APPLIED PHYSICS, 1992, 72 (09) :3988-4002

[6] A CONTINUUM MODEL OF DC AND RF DISCHARGES [J].

GRAVES, DB ;

JENSEN, KF .

IEEE TRANSACTIONS ON PLASMA SCIENCE, 1986, 14 (02) :78-91

[7] ELECTRON AND METASTABLE DENSITIES IN PARALLEL-PLATE RADIOFREQUENCY DISCHARGES [J].

GREENBERG, KE ;

HEBNER, GA .

JOURNAL OF APPLIED PHYSICS, 1993, 73 (12) :8126-8133

[8]

HINDMARSH AC, 1983, UCRL89311 LAWR LIV L

[9]

HINDMARSH AC, 1982, UCRL87406 LAWR LIV L

[10] COMPUTER-SIMULATION OF MATERIALS PROCESSING PLASMA DISCHARGES [J].

KLINE, LE ;

KUSHNER, MJ .

CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES, 1989, 16 (01) :1-35

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