THICKNESS UNIFORMITY OF GAAS LAYERS GROWN BY ELECTROEPITAXY

被引:43
作者
JASTRZEBSKI, L
IMAMURA, Y
GATOS, HC
机构
关键词
D O I
10.1149/1.2131637
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:1140 / 1146
页数:7
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