PRECISION DISPLACEMENT MEASUREMENT BY ACTIVE LASER HETERODYNE INTERFEROMETRY

被引:25
作者
LIN, YJ
PAN, CL
机构
[1] National Chiao Tung University, Institute of Electro-Optical Engineering, Hsinchu
来源
APPLIED OPTICS | 1991年 / 30卷 / 13期
关键词
METROLOGY; LASER;
D O I
10.1364/AO.30.001648
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We demonstrate an active laser heterodyne interferometer which can automatically compensate environmental disturbances and is capable of precision displacement measurement. Two Zeeman He-Ne lasers were employed. Laser II was used as the light source to stabilize the interferometer by using a piezomirror in a feedback loop. The heterodyne signal of the two lasers was used to directly calibrate mirror displacement, with the wavelength of laser I tuned to compensate change in the interference signal due to displacement only. Separation of the contributions to the interference signal from displacement and external disturbances was accomplished by using polarization optics. This interferometer was used to measure the hysteresis of a piezoelectric transducer (PZT) over a dynamic range of 0.5-mu-m with a resolution of +/- 0.8 nm.
引用
收藏
页码:1648 / 1652
页数:5
相关论文
共 16 条
[1]   STATISTICS OF ATOMIC FREQUENCY STANDARDS [J].
ALLAN, DW .
PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1966, 54 (02) :221-&
[2]   FREQUENCY STABILIZATION OF A 0.633-MU-M HE-NE LONGITUDINAL ZEEMAN LASER [J].
BAER, T ;
KOWALSKI, FV ;
HALL, JL .
APPLIED OPTICS, 1980, 19 (18) :3173-3177
[3]   INTERFEROMETRIC MEASUREMENTS WITH LASER FM SIDEBANDS [J].
BJORKLUND, GC ;
JAIN, K ;
HOPE, JD .
APPLIED PHYSICS LETTERS, 1981, 38 (10) :747-749
[4]   IMPROVED LASER TEST OF THE ISOTROPY OF SPACE [J].
BRILLET, A ;
HALL, JL .
PHYSICAL REVIEW LETTERS, 1979, 42 (09) :549-552
[5]   SIMPLE CIRCUIT FOR FEEDBACK STABILIZATION OF A SINGLE-MODE OPTICAL FIBER INTERFEROMETER [J].
FRITSCH, K ;
ADAMOVSKY, G .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1981, 52 (07) :996-1000
[6]  
LIN YJ, 1989, THESIS NATIONAL CHIA
[7]   ACTIVE STABILIZATION OF A MICHELSON INTERFEROMETER BY AN ELECTRO-OPTICALLY TUNED LASER [J].
OLSSON, A ;
TANG, CL ;
GREEN, EL .
APPLIED OPTICS, 1980, 19 (12) :1897-1899
[8]  
PALMER CH, 1977, MATER EVAL, V35, P100
[9]  
PAN CL, 1986, APPL OPTICS, V25, P1375, DOI 10.1364/AO.25.001375
[10]  
PAN CL, 1988, ANN M OPTICAL SOC AM