SINUSOIDAL TEMPERATURE MODULATION OF THE SI-PLANAR-PELLISTOR

被引：22

作者：

AIGNER, R

AUERBACH, F

HUBER, P

MULLER, R

SCHELLER, G

机构：

[1] TU München, Munich

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1994年 / 18卷 / 1-3期

关键词：

D O I：

10.1016/0925-4005(94)87073-X

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

The Si-Planar-Pellistor has a thermal time constant in the range of several milliseconds. Therefore it is possible to modulate its operating temperature with frequencies up to about 100 Hz. The non-linear characteristics of chemical reactions generate harmonics in the sensor's signal which can be used for gas detection. The paper demonstrates the measurement setup, compares measurements with theoretical results and introduces a method to adjust the sensor's selectivity by temperature.

引用

页码：143 / 147

页数：5

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