CHARACTERISTICS OF A THIN-FILM MICROTRANSFORMER WITH CIRCULAR SPIRAL COILS

被引：44

作者：

YAMAGUCHI, K

OHNUMA, S

IMAGAWA, T

TORIU, J

MATSUKI, H

MURAKAMI, K

机构：

[1] HITACHI LTD,HITACHI RES LAB,HITACHI 31912,JAPAN

[2] TOHOKU UNIV,FAC ENGN,DEPT ELECT ENGN,AOBA KU,SENDAI,MIYAGI 980,JAPAN

[3] HACHINOHE INST TECHNOL,HACHINOHE 031,JAPAN

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1993年 / 29卷 / 05期

关键词：

Amorphous materials - Anisotropy - Electric coils - Electric windings - Electronic equipment manufacture - Fabrication - Magnetic properties - Magnetic thin films - Mathematical models - Microelectronics - Photolithography - Thin film devices;

D O I：

10.1109/20.231626

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A thin film microtransformer with the size of 3.14 x 3.88 mm2 was fabricated by using photolithography technology to support high-frequency switching regulators. The microtransformer was composed of sputtered amorphous magnetic layers, electroplated copper windings with 20 mum width and insulator layers. A coupling factor between the primary and secondard windings of the microtransformer was 0.97 for f = 3 MHz. The input-output voltage ratio of 0.95 at 15 MHz was obtained at no-load. The observation of the domain images under high frequency excitation indicated the magnetic anisotropy of films of the microtransformer with circular spiral coils was induced by a rotating magnetic field annealing so as to increase the output voltage.

引用

页码：2232 / 2237

页数：6

共 8 条

[1] MAGNETIC DOMAIN IMAGING WITH A SCANNING KERR EFFECT MICROSCOPE
KASIRAJ, P
SHELBY, RM
BEST, JS
HORNE, DE
[J]. IEEE TRANSACTIONS ON MAGNETICS, 1986, 22 (05) : 837 - 839
[2] MAGNETIC ANNEALING OF ZERO MAGNETOSTRICTIVE AMORPHOUS ALLOY WITH HIGH SATURATION INDUCTION
KOHMOTO, O
FUJISHIMA, H
OJIMA, T
[J]. IEEE TRANSACTIONS ON MAGNETICS, 1980, 16 (02) : 440 - 443
[3] MAKINO Y, 1981, J APPL PHYS, V52, P2477
[4] MATSUKI H, 1989, J MAGN SOC JAPAN, V13, P367
[5] A NEW PLANAR MICROTRANSFORMER FOR USE IN MICRO-SWITCHING CONVERTERS
MINO, M
YACHI, T
TAGO, A
YANAGISAWA, K
SAKAKIBARA, K
[J]. IEEE TRANSACTIONS ON MAGNETICS, 1992, 28 (04) : 1969 - 1973
[6] OSHIRO O, 1988, J MAGN SOC JPN, V12, P385
[7] HIGH-FREQUENCY OPERATION OF A PLANAR-TYPE MICROTRANSFORMER AND ITS APPLICATION TO MULTILAYERED SWITCHING REGULATORS
YAMASAWA, K
MARUYAMA, K
HIROHAMA, I
BIRINGER, PP
[J]. IEEE TRANSACTIONS ON MAGNETICS, 1990, 26 (03) : 1204 - 1209
[8] YUITOO I, 1989, J MAGN SOC JPN, V13, P519

← 1 →