OPTICAL BEAM DEFLECTOR USING A PIEZOELECTRIC BIMORPH ACTUATOR

被引：3

作者：

ONO, T

机构：

[1] Research and Development Centre, Toshiba Corporation, Saiwai-ku, Kawasaki, 210, 1, Komukai Toshiba-cho

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1990年 / 22卷 / 1-3期

关键词：

D O I：

10.1016/0924-4247(89)80066-4

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes optical beam deflectors using piezoelectric bimorphs with both ends clamped. In these deflectors, the bimorph must bend so that a mirror affixed onto its central position tilts by applying voltage. The poling configuration which enables the bimorph to generate such a deformation has been analyzed. Deflectors for both one- and two-dimensional operations have been individually fabricated and investigated based on this analytical result. The maximum optical beam deflection and resonance frequency were about 20 mrad and 3.3 kHz, respectively, for a one-dimensional operation deflector. The values were about 16 mrad and 3.0 kHz, respectively, for a two-dimensional operation deflector. © 1990.

引用

页码：726 / 728

页数：3