GAUSSIAN BEAMS FROM VARIABLE GROOVE DEPTH GRATING COUPLERS IN PLANAR WAVE-GUIDES

被引：37

作者：

BATES, KA ^{[1
]}

LI, LF ^{[1
]}

RONCONE, RL ^{[1
]}

BURKE, JJ ^{[1
]}

机构：

[1] IBM CORP, ADSTAR, TUCSON, AZ 85744 USA

来源：

APPLIED OPTICS | 1993年 / 32卷 / 12期

关键词：

WAVE-GUIDE GRATING COUPLER; ION-BEAM ETCHING; INTEGRATED OPTICS;

D O I：

10.1364/AO.32.002112

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Analysis, fabrication, and characterization of variable groove depth planar waveguide grating couplers are presented. A formula is derived to describe the grating groove depth variation necessary to produce an outcoupled beam of arbitrary profile. A variable depth grating for producing a Gaussian beam profile is fabricated on a waveguide by ion-beam etching through a scanning slit apparatus. A photoresist grating placed on the waveguide provides a mask to define the grating etched on to the waveguide. The near-field irradiance of the outcoupled beam is measured and shown to approach a Gaussian profile.

引用

页码：2112 / 2116

页数：5

共 7 条

[1]

LI L, 1988, P SOC PHOTO-OPT INS, V835, P72

[2]

Lipovskaya M. Yu., 1983, Soviet Physics - Technical Physics, V28, P503

[3] INTENSITY PROFILE OF OUTGOING BEAMS FROM UNIFORM AND LINEARLY TAPERED GRATING COUPLERS [J].