AN INTEGRATED LOW-POWER THIN-FILM CO GAS SENSOR ON SILICON

被引:100
作者
DEMARNE, V
GRISEL, A
机构
[1] Cent Suisse d'Electronique et de, Microtechnique SA, Neuchatel, Switz, Cent Suisse d'Electronique et de Microtechnique SA, Neuchatel, Switz
来源
SENSORS AND ACTUATORS | 1988年 / 13卷 / 04期
关键词
D O I
10.1016/0250-6874(88)80043-X
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
18
引用
收藏
页码:301 / 313
页数:13
相关论文
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