FULLERENES AS PRECURSORS FOR DIAMOND FILM GROWTH WITHOUT HYDROGEN OR OXYGEN ADDITIONS

被引:257
作者
GRUEN, DM
LIU, SZ
KRAUSS, AR
LUO, JS
PAN, XZ
机构
[1] ARGONNE NATL LAB,DIV CHEM,ARGONNE,IL 60439
[2] ARGONNE NATL LAB,DIV CHEM TECHNOL,ARGONNE,IL 60439
关键词
D O I
10.1063/1.111872
中图分类号
O59 [应用物理学];
学科分类号
摘要
Diamond films are predominantly grown using approximately 1% of a hydrocarbon precursor in hydrogen gas. Hydrogen is generally believed to be necessary for the diamond thin-film growth process. However, hydrogen in varying amounts is inevitably incorporated in the growing diamond lattice, leading to structural defects. We report here the successful growth of diamond films using fullerene precursors in an argon microwave plasma, a unique development achieved without the addition of hydrogen or oxygen. We speculate that collisional fragmentation of C60 to give C2 could be responsible for the high growth rate of the very-fine-grained diamond films.
引用
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页码:1502 / 1504
页数:3
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