Transient Ionic Space Charges in Thin Oxide Films

被引：6

作者：

Lohrengel, M. M. ^{[1
]}

机构：

[1] Univ Dusseldorf, D-40225 Dusseldorf, Germany

来源：

IONICS | 1995年 / 1卷 / 5-6期

关键词：

D O I：

10.1007/BF02375282

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The initial step of anodic growth of thin oxide films (1 to 100 nm) on AI and Ta is the simultaneous emission of metal cations from the interface metal/oxide and oxygen ions from the interface oxide/electrolyte. These ions represent mobile space charges which migrate through the oxide film to the opposite interfaces. This process requires times from mu s to 10(4) s, depending on the field strength and the film thickness and was monitored in the time domain (current transients of potential steps, 10(-6) s to 10(4) s). The movement of the ionic space charges can be used to determine the concentration of mobile ions, the film thickness, the thickness distribution of non-homogeneous films and the temperature of extreme thin films.

引用

页码：393 / 399

页数：7

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