SECONDARY-ION MASS-SPECTROSCOPY ANALYSIS FOR ALUMINUM SURFACES TREATED BY GLOW-DISCHARGE CLEANING

被引:2
作者
CHEN, JR
HSIUNG, GY
LIU, YC
LEE, WH
NEE, CC
机构
[1] NATL TSING HUA UNIV,INST NUCL SCI,HSINCHU 300,TAIWAN
[2] NATL TSING HUA UNIV,DEPT PHYS,HSINCHU 300,TAIWAN
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1995年 / 13卷 / 03期
关键词
D O I
10.1116/1.579786
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:562 / 570
页数:9
相关论文
共 9 条
[1]  
Benninghoven A., 1987, SECONDARY ION MASS S, P186
[2]  
CALDER R, 1977, CERNISRVA7759 REP
[3]  
CHEN JR, 1987, J VAC SOC ROC, V1, P13
[4]   GLOW-DISCHARGE TECHNIQUES FOR CONDITIONING HIGH-VACUUM SYSTEMS [J].
DYLLA, HF .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (03) :1276-1287
[5]   GLOW-DISCHARGE CLEANING OF STAINLESS-STEEL ACCELERATOR BEAM TUBES [J].
HSEUH, HC ;
CHOU, TS ;
CHRISTIANSON, CA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (03) :518-522
[6]  
HSIUNG GY, 1991, AIP CONF PROC, V236, P355
[7]   VACUUM PROBLEMS IN PARTICLE ACCELERATORS DUE TO INTERACTION OF SYNCHROTRON RADIATION, ELECTRONS AND IONS WITH SURFACES [J].
MATHEWSON, AG .
VACUUM, 1993, 44 (5-7) :479-483
[8]  
MOMOSE T, 1994, 9TH P M ULTR VAC TEC, P435
[9]   OXYGEN DISCHARGE CLEANING METHOD FOR ALUMINUM STORAGE-RING VACUUM CHAMBERS [J].
SAITOH, M ;
KANAZAWA, K ;
MOMOSE, T ;
ISHIMARU, H ;
OTA, N ;
URAMOTO, J .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1993, 11 (05) :2518-2524