CHEMICAL VAPOR-DEPOSITION OF SILICON-CARBIDE FROM 1,3-DISILACYCLOBUTANE

被引：35

作者：

LARKIN, DJ ^{[1
]}

INTERRANTE, LV ^{[1
]}

机构：

[1] RENSSELAER POLYTECH INST,DEPT CHEM,TROY,NY 12180

来源：

CHEMISTRY OF MATERIALS | 1992年 / 4卷 / 01期

关键词：

D O I：

10.1021/cm00019a009

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

[No abstract available]

引用

页码：22 / 24

页数：3

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