SIMPLE CALCULATION ON BACKSCATTERING OF LIGHT IONS OF KEV ENERGIES

被引：9

作者：

ISHITANI, T

SHIMIZU, R

机构：

来源：

关键词：

D O I：

10.1143/JJAP.10.821

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：821 / +

页数：1

共 10 条

[1] BARNETT CF, 1966, ORNL4063 REP, P79
[2] SCATTERING OF KEV PROTONS FROM COPPER SURFACES
BEHRISCH, R
[J]. CANADIAN JOURNAL OF PHYSICS, 1968, 46 (06) : 527 - &
[3] SIMPLE THEORY CONCERNING THE REFLECTION OF ELECTRONS FROM SOLIDS
EVERHART, TE
[J]. JOURNAL OF APPLIED PHYSICS, 1960, 31 (08) : 1483 - 1490
[4] FOGEL YM, 1960, SOV PHYS-TECH PHYS, V5, P58
[5] SCATTERING EFFECTS IN ION BEAM EXPOSURE OF PHOTORESIST POLYMER FILMS
KANAYA, K
SHIMIZU, K
ISHIKAWA, Y
[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1968, 1 (12) : 1657 - &
[6] Lindhard J., 1963, KGL DANSKE VIDENSKAB, V33
[7] BACK-SCATTERING OF KEV HYDROGEN IONS IN SOLIDS
MCRACKEN, GM
FREEMAN, NJ
[J]. JOURNAL OF PHYSICS PART B ATOMIC AND MOLECULAR PHYSICS, 1969, 2 (06): : 661 - &
[8] SCATTERING OF LOW ENERGY HYDROGEN IONS (H1+,H2+ AND H3+) AND ATOMS (H10) FROM EVAPORATED METALLIC FILMS
MORITA, K
AKIMUNE, H
SUITA, T
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1968, 7 (08) : 916 - &
[9] NELSON RS, 1968, OBSERVATION ATOMIC C, P37
[10] PANIN PV, 1962, SOVIET PHYSICS JETP, V14