WRITING ERRORS IN AN OPTICAL RETICLE WRITER

被引：1

作者：

SANDSTROM, T

LOFQVIST, S

机构：

来源：

MICROELECTRONIC ENGINEERING | 1991年 / 13卷 / 1-4期

关键词：

D O I：

10.1016/0167-9317(91)90064-K

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The LRS-18 laser reticle writer is described and analyzed. Thermal steady-state, insulation from vibrations, fast servo loops, and automatic calibration are employed to achieve highly accurate writing. Predicted system errors are presented and supported by actual writing statistics.

引用

页码：135 / 138

页数：4