FREQUENCY TRIMMING OF ZNO GLASS SAW FILTERS

被引：8

作者：

KADOTA, M

KONDO, C

IKEDA, T

KASANAMI, T

机构：

[1] Murata MFG. Co. Ltd., Nagaokakyo-shi, Kyoto

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1991年 / 30卷

关键词：

SAW FILTER; ZNO THIN FILM; FREQUENCY TRIMMING; ORGANIC MATERIAL; MASS PRODUCTION; FREQUENCY DEVIATION;

D O I：

10.7567/JJAPS.30S1.179

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

In the process of producing ZnO/glass SAW filters, a desired frequency cannot always be obtained after sputtering ZnO thin films on IDT/glass substrates. It is therefore necessary to adjust the center frequency of each SAW filter within 0.05% tolerance after sputtering. We have developed a method to adjust the center frequency in a mass production process by overlaying organic polymer resin on the substrates. The frequency deviation then becomes very small not only in one lot, but also between lots, and the mass production cost of SAW filters can be reduced tremendously.

引用

页码：179 / 181

页数：3