ELECTRON-ENERGY DEPOSITION IN ATOMIC OXYGEN

被引：30

作者：

SLINKER, SP

TAYLOR, RD

ALI, AW

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 01期

关键词：

D O I：

10.1063/1.340491

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1 / 10

页数：10

共 55 条

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