EPITAXIAL GROWTH OF TITANIUM THIN FILMS

被引：59

作者：

WAWNER, FE

LAWLESS, KR

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1969年 / 6卷 / 04期

关键词：

D O I：

10.1116/1.1315691

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：588 / &

共 16 条

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[7]

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