DIRECT WRITING WITH THE SCANNING TUNNELING MICROSCOPE

被引:57
作者
EHRICHS, EE
SILVER, RM
DELOZANNE, AL
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 02期
关键词
D O I
10.1116/1.575378
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:540 / 543
页数:4
相关论文
共 24 条
[1]   SURFACE MODIFICATION WITH THE SCANNING TUNNELING MICROSCOPE [J].
ABRAHAM, DW ;
MAMIN, HJ ;
GANZ, E ;
CLARKE, J .
IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1986, 30 (05) :492-499
[2]   ATOMIC-SCALE SURFACE MODIFICATIONS USING A TUNNELING MICROSCOPE [J].
BECKER, RS ;
GOLOVCHENKO, JA ;
SWARTZENTRUBER, BS .
NATURE, 1987, 325 (6103) :419-421
[3]  
BINNIG G, 1985, Patent No. 4550257
[4]  
BRODIE I, 1982, PHYSICS MICROFABRICA, P348
[5]   AN ANALYTIC THEORY OF PHOTODISSOCIATION OF LINEAR SYMMETRIC POLYATOMIC-MOLECULES [J].
CHEN, CJ ;
OSGOOD, RM .
JOURNAL OF CHEMICAL PHYSICS, 1984, 81 (01) :318-326
[6]   A SPECTROSCOPIC STUDY OF THE EXCITED-STATES OF DIMETHYLZINC, DIMETHYLCADMIUM, AND DIMETHYLMERCURY [J].
CHEN, CJ ;
OSGOOD, RM .
JOURNAL OF CHEMICAL PHYSICS, 1984, 81 (01) :327-334
[7]   METAL-DEPOSITION BY ELECTRON-BEAM EXPOSURE OF AN ORGANOMETALLIC FILM [J].
CRAIGHEAD, HG ;
SCHIAVONE, LM .
APPLIED PHYSICS LETTERS, 1986, 48 (25) :1748-1750
[8]  
EHRLICH DJ, 1983, J VAC SCI TECHNOL B, V1, P969, DOI 10.1116/1.582718
[9]  
FOSTER J, 1987, UNPUB STM 87 C OXNAR
[10]  
Hansma P K., 1982, TUNNELING SPECTROSCO