SPATIAL DISTRIBUTION OF BACKSCATTERED ELECTRONS IN SCANNING ELECTRON-MICROSCOPE AND ELECTRON-MICROPROBE

被引：80

作者：

MURATA, K ^{[1
]}

机构：

[1] OSAKA UNIV,APPL PHYS DEPT,SUITA,OSAKA,JAPAN

来源：

JOURNAL OF APPLIED PHYSICS | 1974年 / 45卷 / 09期

关键词：

D O I：

10.1063/1.1663920

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4110 / 4117

页数：8

共 12 条

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[3] MULTIPLE SCATTERING OF 5-30 KEV ELECTRONS IN EVAPORATED METALS FILMS . 1 . TOTAL TRANSMISSION + ANGULAR DISTRIBUTION [J].

COSSLETT, VE ;

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[5] DIRECT OBSERVATION OF BACKSCATTER ELECTRON DISTRIBUTIONS ON SURFACES [J].

HEIDENREICH, RD ;

THOMPSON, LF .

APPLIED PHYSICS LETTERS, 1973, 22 (06) :279-281

[6]

KREFTING ER, 1973, QUANTITATIVE ANAL EL, P114

[7] QUANTITATIVE ELECTRON-MICROPROBE ANALYSIS OF THIN-FILMS ON SUBSTRATES [J].

KYSER, DF ;

MURATA, K .

IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1974, 18 (04) :352-363

[8] MONTE CARLO CALCULATIONS ON ELECTRON SCATTERING IN A SOLID TARGET [J].

MURATA, K ;

MATSUKAWA, T ;

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JAPANESE JOURNAL OF APPLIED PHYSICS, 1971, 10 (06) :678-+

[9]

MURATA K, 1973, SCANNING ELECTRON MI, P268

[10]

MURATA K, 1972, 6TH P INT C XRAY OPT, P105

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