MASS-TRANSPORT DURING LASER CHEMICAL VAPOR-DEPOSITION

被引:6
作者
COPLEY, SM [1 ]
机构
[1] UNIV SO CALIF,CTR LASER STUDIES,DEPT MECH ENGN,LOS ANGELES,CA 90089
关键词
D O I
10.1063/1.341714
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:2064 / 2068
页数:5
相关论文
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