MULTI-APERTURE ION-SOURCE WITH A DEFLECTABLE FOCUSED BEAM FOR COMPOSITIONAL CONTROL IN SPUTTER DEPOSITION

被引：8

作者：

SMITS, JW

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 19卷 / 03期

关键词：

D O I：

10.1116/1.571090

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：704 / 708

页数：5

共 9 条

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TEMPLE, W
BEANLAND, D
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[J]. NUCLEAR INSTRUMENTS & METHODS, 1976, 135 (01): : 1 - 11
[5] FOCUSED ION-BEAM DESIGNS FOR SPUTTER DEPOSITION
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[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (03): : 899 - 905
[6] ION THRUSTER SYSTEMS WITH THRUST VECTOR DEFLECTION
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[J]. JOURNAL OF SPACECRAFT AND ROCKETS, 1971, 8 (05) : 552 - &
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