OBSERVATIONS ON AGING OF TI-BASED METALLIZATIONS IN AIR-HCL ENVIRONMENTS

被引：13

作者：

SPEIGHT, JD ^{[1
]}

BILL, MJ ^{[1
]}

机构：

[1] BELL TEL LABS INC,ALLENTOWN,PA 18103

来源：

关键词：

D O I：

10.1016/0040-6090(73)90188-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：325 / 353

页数：29

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