CHARACTERIZATION OF LONG-PERIODIC LAYERED STRUCTURES BY X-RAY-DIFFRACTION .5. SMALL-ANGLE X-RAY-SCATTERING OF DISTORTED MULTILAYERS

被引：6

作者：

SASANUMA, Y

NAKAYAMA, K

机构：

[1] Department of Polymer Physics, National Institute of Materials and Chemical Research (NIMC), Tsukuba, Ibaraki, 305

来源：

THIN SOLID FILMS | 1994年 / 247卷 / 01期

关键词：

D O I：

10.1016/0040-6090(94)90471-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Small angle X-ray scattering (SAXS) functions of various distorted multilayers (MLs) are presented. The following structural modifications are treated here: the finiteness of the ML structure, the paracrystalline distortion, the layer-thickness distribution, the layer curvature, the formation of the transitional zone at the interface, and the electron-density fluctuation. For each defect, the characteristic features of the SAXS patteRN are elucidated. The methodology of the precise structural characterization of MLs by SAXS is proposed, and its applicability and limitations are discussed.

引用

页码：24 / 33

页数：10

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