SILICON MICROMACHINED 2-DIMENSIONAL GALVANO OPTICAL SCANNER

被引：94

作者：

ASADA, N

MATSUKI, H

MINAMI, K

ESASHI, M

机构：

[1] Tohoku Univ., Sendai

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1994年 / 30卷 / 06期

关键词：

Electric coils - Electric currents - Electrostatics - Etching - Fabrication - Magnetic couplings - Magnetic permeability - Magnetization - Permanent magnets;

D O I：

10.1109/20.334177

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new two-dimensional galvano optical scanner realized by silicon micromachining is proposed. To realize two-dimensional operation a silicon micromachined gimbal structure was introduced. It is possible to sense rotational angle using electromagnetic coupling between driving coil and fixed detecting coil.

引用

页码：4647 / 4649

页数：3