THE OPTICAL-PROPERTIES OF SIOX FORMED BY HIGH-DOSE SI ION-IMPLANTATION INTO FUSED-SILICA

被引：22

作者：

HEIDEMANN, KF

机构：

来源：

RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1982年 / 61卷 / 3-4期

关键词：

D O I：

10.1080/00337578208229937

中图分类号：

TL [原子能技术]; O571 [原子核物理学];

学科分类号：

0827 ; 082701 ;

摘要：

SIO//X LAYERS WITH CONTINUOUS DEPTH PROFILES OF THE OXYGEN CONCENTRATION ARE FORMED ABOUT 2 ″MU″ M BELOW THE SURFACE BY2 MEV SI ION IMPLANTATION INTO FUSED SILICA. THE DEPTH DISTRIBUTION OF THE CHANGED OPTICAL PROPERTIES IS REVEALED BY HIGH-RESOLUTION REFLECTION AND TRANSMISSION PROFILES MEASURED ACROSS THE BEVELED SURFACE OF THE IRRADIATED SAMPLES. THE UNDERLYING DEPTH PROFILES OF THE REFRACTIVE INDEX AND OF THE EXTINCTION COEFFICIENT ARE EVALUATED FROM REFLECTION AND TRANSMISSION MEASUREMENTS BY A METHOD WHICH IS BASED ON EXACT FORMULAS FOR THE LIGHT PROPAGATION WITHIN CONTINUOUS DEPTH PROFILES OF THE COMPLEX REFRACTIVE INDEX.

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页码：235 / 246

页数：12

相关论文

共 46 条

[1] HEAVY-ION AND ELECTRON-IRRADIATION EFFECTS IN VITREOUS SILICA [J].

ANTONINI, M ;

CAMAGNI, P ;

MANARA, A ;

MORO, L .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1981, 44 (2-3) :321-330

[2]

ASPNES DE, 1979, PHYS REV B, V20, P3293

[3]

Bayly A. R., 1973, Radiation Effects, V18, P111, DOI 10.1080/00337577308234725

[4] ELLIPSOMETRIC ANALYSIS OF REFRACTIVE-INDEX PROFILES PRODUCED BY ION-IMPLANTATION IN SILICA GLASS [J].

BAYLY, AR ;

TOWNSEND, PD .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1973, 6 (09) :1115-1128

[5] SCATTERING CHARACTERISTICS OF OPTICAL-MATERIALS [J].

BENNETT, HE .

OPTICAL ENGINEERING, 1978, 17 (05) :480-488

[6] Z1-OSCILLATIONS IN LOW-ENERGY HEAVY-ION RANGES [J].

BESENBACHER, F ;

BOTTIGER, J ;

LAURSEN, T ;

LOFTAGER, P ;

MOLLER, W .

NUCLEAR INSTRUMENTS & METHODS, 1980, 170 (1-3) :183-188

[7]

Born M., 1999, PRINCIPLES OPTICS EL, DOI 10.1017/CBO9781139644181

[8] VOLUME, INDEX-OF-REFRACTION, AND STRESS CHANGES IN ELECTRON-IRRADIATED VITREOUS SILICA [J].

DELLIN, TA ;

TICHENOR, DA ;

BARSIS, EH .

JOURNAL OF APPLIED PHYSICS, 1977, 48 (03) :1131-1138

[9] FORMATION OF WAVE-GUIDES AND MODULATORS IN LINBO3 BY ION-IMPLANTATION [J].

DESTEFANIS, GL ;

GAILLIARD, JP ;

LIGEON, EL ;

VALETTE, S ;

FARMERY, BW ;

TOWNSEND, PD ;

PEREZ, A .

JOURNAL OF APPLIED PHYSICS, 1979, 50 (12) :7898-7905

[10] FUNDAMENTAL DEFECT CENTERS IN GLASS - PEROXY RADICAL IN IRRADIATED, HIGH-PURITY, FUSED-SILICA [J].

FRIEBELE, EJ ;

GRISCOM, DL ;

STAPELBROEK, M ;

WEEKS, RA .

PHYSICAL REVIEW LETTERS, 1979, 42 (20) :1346-1349

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