SOFT MAGNETIC-PROPERTIES OF NONEQUILIBRIUM BCC FE-HF ALLOYS PRODUCED BY RF-SPUTTERING

被引：7

作者：

KATAOKA, N

HOSOKAWA, M

INOUE, A

MASUMOTO, T

机构：

[1] Institute for Materials Research, Tohoku University

来源：

MATERIALS TRANSACTIONS JIM | 1990年 / 31卷 / 05期

关键词：

Fe-based alloy; magnetic property; nonequilibrium bcc phase; rf sputter-deposition; soft magnetic material; vapor quenching;

D O I：

10.2320/matertrans1989.31.429

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Microstructure and magnetic properties of Fe-rich Fe-Hf alloy films produced by rf sputtering have been investigated as a function of Hf content. The films in the concentration range 1-6 at%Hf have a nonequilibrium bcc phase with fine grains of 5 to 20 nm and exhibit high saturation magnetization and soft magnetic properties. In particular, the bcc Fe95.6Hf4.4 film annealed at 673 K for 3.6 ks exhibits a saturation magnetization of 1.9 T and an effective permeability of 1800 at 1 MHz. © 1990, The Japan Institute of Metals. All rights reserved.

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页码：429 / 432

页数：4

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