THIN-FILM SOLID-STATE LITHIUM BATTERIES PREPARED BY CONSECUTIVE VAPOR-PHASE PROCESSES

Thin-film solid-state lithium batteries of total thickness less than 20-mu-m were prepared. These thin lithium batteries were fabricated using a thin film of TiS2 prepared by chemical vapor deposition (CVD) as the cathode active material, a thin film of solid polymer prepared by plasma polymerization as the electrolyte, and a thin film of lithium deposited by thermal evaporation as the anode. The solid polymer electrolyte film was formed by complexation of plasma-polymerized tris(2-methoxyethoxy)vinylsilane with lithium perchlorate. Its room temperature conductivity was greater than 10(-6) S cm-1 (10(2)OMEGA cm2 resistance per unit area). The battery's discharge properties at room temperature and different current densities were examined. The effects of the interfaces between the solid polymer electrolyte and the electrodes on the battery's discharge performance are discussed.