A STUDY OF THE COMPOSITIONAL DEPENDENCE OF THE QUALITY OF INSITU GROWN YBACUO FILMS IN E-BEAM COEVAPORATION

被引：1

作者：

NAITO, M

机构：

[1] NTT Basic Research Laboratories, Musashino-shi, Tokyo, 180, Midori-cho

来源：

PHYSICA C-SUPERCONDUCTIVITY AND ITS APPLICATIONS | 1991年 / 185卷

关键词：

D O I：

10.1016/0921-4534(91)91113-I

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

In-situ growth of YBaCuO thin films has bee performed in the UHV E-beam coevaporation system with careful control of the evaporation rates of metal based on electron impact emission rate monitors, which enables systematic investigation of the compositional dependence of the quality of grown films. The results show that best quality films can be obtaine in a well defined and narrow compositional range, suggesting that stringent rate control is essential for MBE growth of oxide superconductor films.

引用

页码：1977 / 1978

页数：2

共 3 条

[1] EFFECT OF SMALL CHANGES IN COMPOSITION ON THE ELECTRICAL AND STRUCTURAL-PROPERTIES OF YBA2CU3O7 THIN-FILMS [J].