GROWTH OF POLYSILICON SHEETS BY THE RAD PROCESS

被引：6

作者：

BELOUET, C

机构：

来源：

关键词：

D O I：

10.1016/0022-0248(80)90250-X

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：279 / 290

页数：12

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