PULSED-LASER ABLATION OF COPPER

被引：82

作者：

JORDAN, R ^{[1
]}

COLE, D ^{[1
]}

LUNNEY, JG ^{[1
]}

MACKAY, K ^{[1
]}

GIVORD, D ^{[1
]}

机构：

[1] CNRS,LAB MAGNETISME LOUIS NEEL,GRENOBLE,FRANCE

来源：

APPLIED SURFACE SCIENCE | 1995年 / 86卷 / 1-4期

关键词：

D O I：

10.1016/0169-4332(94)00370-X

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The laser ablation of copper with a 532 nm, 6 ns laser has been investigated in the regime normally used for pulsed laser deposition. The ablation depth per pulse and the flux and energy distribution of the ions in the plume were measured and compared to the deposition rate as measured by a quartz microbalance. These measurements were compared with an analytic model of ablation via a laser sustained plasma. It is shown that self-sputtering of the growing film is significant.

引用

页码：24 / 28

页数：5

共 14 条

[1]

CHRISEY, IN PRESS PULSED LASE

[2] CU0, CU+, AND CU-2 FROM EXCIMER-ABLATED COPPER [J].