THERMAL-ANALYSIS OF THIN-FILM MICROMACHINING WITH LASERS

被引：46

作者：

PAEK, UC ^{[1
]}

KESTENBAUM, A ^{[1
]}

机构：

[1] WESTERN ELECT CO INC, ENGN RES CTR, PRINCETON, NJ 08540 USA

来源：

关键词：

D O I：

10.1063/1.1662547

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2260 / 2268

页数：9

共 11 条

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[2] HELIUM-NEON LASER - THERMAL HIGH-RESOLUTION RECORDING
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[3] LASER MACHINING OF THIN FILMS AND INTEGRATED CIRCUITS
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[J]. BELL SYSTEM TECHNICAL JOURNAL, 1968, 47 (03): : 385 - +
[4] GOLDSTEIN TH, PRIVATE COMMUNICATIO
[5] LASER-MACHINING THIN-FILM ELECTRODE ARRAYS ON QUARTZ CRYSTAL SUBSTRATES
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UNGER, BA
[J]. JOURNAL OF APPLIED PHYSICS, 1969, 40 (08) : 3157 - &
[6] KOMAR AI, 1967, OPT SPECTROSC-USSR, V23, P450
[7] *ETUDE DE LA REPARTITION DE LA CHALEUR DANS LANTICATHODE DUN TUBE A RAYON-X
MATRICON, M
[J]. JOURNAL DE PHYSIQUE ET LE RADIUM, 1951, 12 (01): : 15 - 25
[8] MICROMACHINING AND IMAGE RECORDING ON THIN FILMS BY LASER BEAMS
MAYDAN, D
[J]. BELL SYSTEM TECHNICAL JOURNAL, 1971, 50 (06): : 1761 - +
[9] MAGNETIC HOLOGRAPHY
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[10] STRUCTURAL INVESTIGATION OF LASER MACHINING OF THIN BISMUTH FILMS
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[J]. JOURNAL OF APPLIED PHYSICS, 1971, 42 (12) : 5084 - &